PVD and CVD Technologies in Semiconductor Device Fabrication

Scheduling Semiconductor Wafer Fabrication

This paper is concerned with assessing the impact that scheduling can have on the performance of semiconductor wafer fabrication facilities. The performance measure considered here is the mean throughput time (sometimes called cycle time, turnaround time or manufacturing interval) for a lot of wafers. A variety of input control and sequencing rules are evaluated using a simulation model of a re...

CVD and PVD coating process modelling by using artificial neural networks

Thin-film coating plays a prominent role on the manufacture of many industrial devices. Coating can increase material performance due to the deposition process. Having adequate and precise model that can predict the hardness of PVD and CVD processes is so helpful for manufacturers and engineers to choose suitable parameters in order to obtain the best hardness and decreasing cost and time of in...

Semiconductor Device Simulation by a New Method of Solving Poisson, Laplace and Schrodinger Equations (RESEARCH NOTE)

In this paper, we have extended and completed our previous work, that was introducing a new method for finite differentiation. We show the applicability of the method for solving a wide variety of equations such as Poisson, Lap lace and Schrodinger. These equations are fundamental to the most semiconductor device simulators. In a section, we solve the Shordinger equation by this method in sever...

Highlights in Semiconductor Device Development

The agricultural civilization in the cultural history of man was said to be the result of two genetic accidents which gave birth to a new species of bread wheat some 10,000 years ago, involving wild wheat and goat grass. Large-scale agricultural activity in man's society followed. Great inventions or discoveries could be considered to be such genetic accidents-mutations. New knowledge, arising ...

Editor's Introduction: Semiconductor Technologies